薄膜材料デバイス研究会 プロシーディングス
第7回研究集会 (2010年度) (Proceedings of the Seventh Thin-Films Materials and Devices
Meeting)
Published online 12 January 2010
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110107015-1 - 5
Lateral Crystallization of Amorphous Silicon
Films Induced by Flash Lamp Annealing
Keisuke Ohdaira1,2, Shohei Ishii1, Naohito Tomura1,
and Hideki Matsumura1
1 Japan Advanced Institute of Science and Technology (JAIST), 1-1
Asahidai, Nomi, Ishikawa 923-1292, Japan
2 Japan Science and Technology Agency (JST), 4-1-8 Honcho,
Kawaguchi, Saitama 332-0012, Japan
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110107067-1 - 6
Minority Carrier Lifetime Measurement by
Photo-Induced Carrier Microwave Absorption Method
T. Nagao1, S. Yoshidomi1, M. Hasumi1, T.
Sameshima1, and T. Mizuno2
1 Tokyo University of Agriculture and Technology, 2-24-16 Nakacho,
Koganei, Tokyo 184-8588, Japan
2 Kanagawa University, 2946 Tsuchiya, Hiratsuka, Kanagawa
259-1293, Japan