プロシーディングス
第6回研究集会 (2009年度) (Proceedings of the fifth Thin-Films
Materials and Devices Meeting)
Published online 28 February 2010
- 100228043-1 - 5
Fabrication and Evaluation of SrTa2O6 Thin Films Using Chemical Solution Deposition Method
Li Lu1, Masahiro Echizen1, Takashi Nishida1, Kiyoshi Uchiyama1, and Yukiharu Uraoka1,2
1 Graduate School of Materials Science, Nara Institute of Science and Technology,
8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
2 CREST, Japan Science and Technology Agency